검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of glass substrate surface roughness on extreme ultraviolet reflectivity of Mo/Si multilayer Miyagaki S, Yamanashi H, Yamaguchi A, Nishiyama L Journal of Vacuum Science & Technology B, 22(6), 3063, 2004 |
| No. | Article |
|---|---|
| 1 |
Influence of glass substrate surface roughness on extreme ultraviolet reflectivity of Mo/Si multilayer Miyagaki S, Yamanashi H, Yamaguchi A, Nishiyama L Journal of Vacuum Science & Technology B, 22(6), 3063, 2004 |