검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface modified spin-on xerogel films as interlayer dielectrics Nitta SV, Pisupatti V, Jain A, Wayner PC, Gill WN, Plawsky JL Journal of Vacuum Science & Technology B, 17(1), 205, 1999 |
| No. | Article |
|---|---|
| 1 |
Surface modified spin-on xerogel films as interlayer dielectrics Nitta SV, Pisupatti V, Jain A, Wayner PC, Gill WN, Plawsky JL Journal of Vacuum Science & Technology B, 17(1), 205, 1999 |