검색결과 : 1건
No. | Article |
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1 |
Hardness and surface roughness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure-plasma enhanced chemical vapor deposition at low temperature Noborisaka M, Horikoshi R, Nagashima S, Shirakura A, Suzuki T Thin Solid Films, 527, 114, 2013 |