검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
CH4/H-2/Ar Electron-Cyclotron-Resonance Plasma-Etching for GaAs-Based Field-Effect Transistors Vanhassel JG, Vanes CM, Nouwens PA, Maahury JH, Kaufmann LM Journal of the Electrochemical Society, 142(8), 2849, 1995 |
| No. | Article |
|---|---|
| 1 |
CH4/H-2/Ar Electron-Cyclotron-Resonance Plasma-Etching for GaAs-Based Field-Effect Transistors Vanhassel JG, Vanes CM, Nouwens PA, Maahury JH, Kaufmann LM Journal of the Electrochemical Society, 142(8), 2849, 1995 |