검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental study of the degradation of mechanical strength of silicon wafers caused by large scale integration processes Yagishita A, Fujii O, Numano M, Kawamura N, Iwase M, Ushiku Y, Arikado T Journal of the Electrochemical Society, 145(9), 3160, 1998 |