검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dioxo-Fluoroalkoxide Tungsten(VI) Complexes for Growth of WOX Thin Films by Aerosol-Assisted Chemical Vapor Deposition Bonsu RO, Kim H, O'Donohue C, Korotkov RY, Abboud KA, Anderson TJ, McElwee-White L Inorganic Chemistry, 54(15), 7536, 2015 |
| 2 |
Tungsten Nitrido Complexes as Precursors for Low Temperature Chemical Vapor Deposition of WNxCy Films as Diffusion Barriers for Cu Metallization McClain KR, O'Donohue C, Koley A, Bonsu RO, Abboud KA, Revelli JC, Anderson TJ, McElwee-White L Journal of the American Chemical Society, 136(4), 1650, 2014 |