| 1 |
Optimization and integration of trimethylsilane-based organosilicate glass and organofluorinated silicate glass dielectric thin films for Cu damascene process
Cheng YL, Wang YL, Hwang GJ, Lee WH, O'Neill ML, Tang A, Wu CL
Journal of Vacuum Science & Technology B, 25(1), 96, 2007 |
| 2 |
The effect of deposition temperature on the structure and electrical properties of low-k film using Diethoxymethylsilane (DEMS) prepared by plasma enhanced chemical vapor deposition
Cheng YL, We BJ, O'Neill ML, Karwacki EJ
Thin Solid Films, 516(2-4), 438, 2007 |
| 3 |
Solvent-free generation of poly(vinyl acetals) directly from poly(vinyl acetate)
O'Neill ML, Newman D, Beckman EJ, Wilkinson SP
Polymer Engineering and Science, 39(5), 862, 1999 |
| 4 |
Solubility of homopolymers and copolymers in carbon dioxide
O'Neill ML, Cao Q, Fang R, Johnston KP, Wilkinson SP, Smith CD, Kerschner JL, Jureller SH
Industrial & Engineering Chemistry Research, 37(8), 3067, 1998 |
| 5 |
Dispersion polymerization in supercritical CO2 with a siloxane-based macromonomer : 1. The particle growth regime
O'Neill ML, Yates MZ, Johnston KP, Smith CD, Wilkinson SP
Macromolecules, 31(9), 2838, 1998 |
| 6 |
Dispersion polymerization in supercritical CO2 with siloxane-based macromonomer. 2. The particle formation regime
O'Neill ML, Yates MZ, Johnston KP, Smith CD, Wilkinson SP
Macromolecules, 31(9), 2848, 1998 |
