검색결과 : 14건
| No. | Article |
|---|---|
| 1 |
Durability of nitrided fluorocarbon polymer films for nanoimprint lithography Kim HH, Park SG, Lee EH, Lee SG, O BH Thin Solid Films, 519(16), 5490, 2011 |
| 2 |
VLSI Photonics: How Can We Approach Using Micro/Nano-Materials? Lee EH, Lee HS, Kwon YK, Kim KH, Lee SG, O BH Molecular Crystals and Liquid Crystals, 522, 459, 2010 |
| 3 |
Realization of various sub-micron metal patterns using room temperature nanoimprint lithography Sung JH, Lee MW, Lee SG, Park SG, Lee EH, O BH Thin Solid Films, 515(12), 5153, 2007 |
| 4 |
Replication-based fabrication for an optical device that incorporates vertically curved structures Lee MW, Lim KJ, Choi CH, Jo SB, Lee SG, Lee EH, Park SG, O BH Journal of Vacuum Science & Technology A, 24(4), 1270, 2006 |
| 5 |
Fabrication of high precision demultiplexer using embossing technique with thermal curable polymers Choi CH, Lee MW, O BH, Lee SG, Park SG, Lee EH Journal of Vacuum Science & Technology A, 24(4), 1293, 2006 |
| 6 |
Characterization of a modified Bosch-type process for silicon mold fabrication Jo SB, Lee MW, Lee SG, Lee EH, Park SG, O BH Journal of Vacuum Science & Technology A, 23(4), 905, 2005 |
| 7 |
Annealing effects on the structural properties of gold films on Si by the RF magnetron sputtering Lee KC, Kim NH, O BH, Kim HW Materials Science Forum, 475-479, 3923, 2005 |
| 8 |
Improvement of the surface characteristics of sputtered metal layer for a MEMS micro-mirror switch Lee MW, Jo SB, Lee KC, Kim CW, Park SG, Lee SG, Lee EH, O BH Thin Solid Films, 447, 615, 2004 |
| 9 |
Effect of time-varying axial magnetic field on high aspect ratio contact hole etching Song HY, Choi YH, O BH, Park SG, Oh JS, Kim JW Thin Solid Films, 435(1-2), 247, 2003 |
| 10 |
Measurement of 100-nm polystyrene sphere by transmission electron microscope Jung KY, Park BC, Song WY, O BH, Eom TB Powder Technology, 126(3), 255, 2002 |