검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A review of ion projection lithography Melngailis J, Mondelli AA, Berry IL, Mohondro R Journal of Vacuum Science & Technology B, 16(3), 927, 1998 |
| 2 |
Study of H- Beams for Ion-Projection Lithography Chen CH, Guharay SK, Reiser M, Riordon J, Orloff J, Melngailis J Journal of Vacuum Science & Technology B, 13(6), 2597, 1995 |