검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhanced Thickness Uniformity and Electrical Performance of Ultrathin Dielectrics Grown by Rtp Using Various N2O-Oxynitridation Processes Wrixon R, Twomey A, Osullivan P, Mathewson A Journal of the Electrochemical Society, 142(8), 2738, 1995 |