검색결과 : 3건
No. | Article |
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1 |
Strain Compensated Heterostructures in the Si1-X-Ygexcy Ternary-System Regolini JL, Bodnar S, Oberlin JC, Ferrieu F, Gauneau M, Lambert B, Boucaud P Journal of Vacuum Science & Technology A, 12(4), 1015, 1994 |
2 |
Millitorr Range PECVD of Alpha-SiO(2) Films Using Teos and Oxygen Templier F, Vallier L, Madar R, Oberlin JC, Devine RA Thin Solid Films, 241(1-2), 251, 1994 |
3 |
Preparation of Low-Resistivity Tungsten Thin-Films Deposited by Microwave-Plasma-Enhanced Chemical-Vapor-Deposition from the Tungsten Hexafluoride Hydrogen System Belkacem A, Arnal Y, Pelletier J, Andre E, Oberlin JC Thin Solid Films, 241(1-2), 301, 1994 |