화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Strain Compensated Heterostructures in the Si1-X-Ygexcy Ternary-System
Regolini JL, Bodnar S, Oberlin JC, Ferrieu F, Gauneau M, Lambert B, Boucaud P
Journal of Vacuum Science & Technology A, 12(4), 1015, 1994
2 Millitorr Range PECVD of Alpha-SiO(2) Films Using Teos and Oxygen
Templier F, Vallier L, Madar R, Oberlin JC, Devine RA
Thin Solid Films, 241(1-2), 251, 1994
3 Preparation of Low-Resistivity Tungsten Thin-Films Deposited by Microwave-Plasma-Enhanced Chemical-Vapor-Deposition from the Tungsten Hexafluoride Hydrogen System
Belkacem A, Arnal Y, Pelletier J, Andre E, Oberlin JC
Thin Solid Films, 241(1-2), 301, 1994