검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Relationships Between the Material Properties of Silicon-Oxide Films Deposited by Electron-Cyclotron-Resonance Chemical-Vapor-Deposition and Their Use as an Indicator of the Dielectric-Constant Fowler B, Obrien E Journal of Vacuum Science & Technology B, 12(1), 441, 1994 |
| 2 |
The Anisotropic Deposition of Doped Silicate Glass Uram KJ, Shugrue JK, Obrien E Journal of the Electrochemical Society, 140(12), L178, 1993 |