검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of ion implantation on the quality of 4H-SiC CVD epitaxial layers Kalinina E, Kholujanov G, Solov'ev V, Strel'chuk A, Kossov V, Yafaev R, Kovarskii, Shchukarev A, Obyden S, Saparin G, Ivannikov P, Hallen A, Konstantinov A Applied Surface Science, 184(1-4), 323, 2001 |