검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characteristics for negative and positive tone resists with direct write electron beam and SCALPEL exposure systems Sato M, Ocala LE, Novembre AE, Ohmori K, Ishikawa K, Katsumata K, Nakayama T Journal of Vacuum Science & Technology B, 17(6), 2873, 1999 |