검색결과 : 1건
No. | Article |
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1 |
Growth of Oriented Aluminum Nitride Films on Silicon by Chemical-Vapor-Deposition Khan AH, Odeh MF, Meese JM, Charlson EM, Charlson EJ, Stacy T, Popovici G, Prelas MA, Wragg JL Journal of Materials Science, 29(16), 4314, 1994 |