검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Endpoint detection in Cu-CMP - Detection of Ta layer to low-k layer transition using fluorescence Kondoju S, Juncker C, Lucas P, Raghavan S, Fischer P, Oehler A, Moinpour M Journal of the Electrochemical Society, 153(9), G830, 2006 |