검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Resolution-limiting factors in low-energy electron-beam proximity projection lithography: Mask, projection, and resist process Yoshizawa M, Oguni K, Nakano H, Amai K, Nohama S, Moriya S, Kitagawa T Journal of Vacuum Science & Technology B, 22(1), 136, 2004 |
| 2 |
Impacts of 30-nm-thick resist on improving resolution performance of low-energy electron beam lithography Yoshizawa M, Moriya S, Oguni K, Nakano H, Omori S, Kitagawa T, Kotera M, Niu H Journal of Vacuum Science & Technology B, 22(6), 3518, 2004 |
| 3 |
Dynamic compressive behavior of unidirectional E-glass/vinylester composites Oguni K, Ravichandran G Journal of Materials Science, 36(4), 831, 2001 |