검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Photoresist removal process by hydrogen radicals generated by W catalyst Takata M, Ogushi K, Yuba Y, Akasaka Y, Tomioka K, Soda E, Kobayashi N Thin Solid Films, 516(5), 847, 2008 |
| 2 |
Influences of atomic hydrogen on porous low-k dielectric for 45-nm node Tomioka K, Soda E, Kobayashi N, Takata M, Uda S, Ogushi K, Yuba Y, Akasaka Y Thin Solid Films, 515(12), 5031, 2007 |