검색결과 : 1건
No. | Article |
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1 |
Atomic-layer resolved monitoring of thermal oxidation of Si(001) by reflectance difference oscillation technique Yasuda T, Nishizawa M, Kumagai N, Yamasaki S, Oheda H, Yamabe K Thin Solid Films, 455-56, 759, 2004 |
No. | Article |
---|---|
1 |
Atomic-layer resolved monitoring of thermal oxidation of Si(001) by reflectance difference oscillation technique Yasuda T, Nishizawa M, Kumagai N, Yamasaki S, Oheda H, Yamabe K Thin Solid Films, 455-56, 759, 2004 |