검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comprehensive study of low temperature (< 1000 degrees C) oxidation process in SiGe/SOI structures Tanaka M, Ohka T, Sadoh T, Miyao M Thin Solid Films, 517(1), 251, 2008 |
| No. | Article |
|---|---|
| 1 |
Comprehensive study of low temperature (< 1000 degrees C) oxidation process in SiGe/SOI structures Tanaka M, Ohka T, Sadoh T, Miyao M Thin Solid Films, 517(1), 251, 2008 |