검색결과 : 2건
No. | Article |
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1 |
Deposition of amorphous carbon films using Ar and/or N-2 magnetron sputter with ring permanent magnet Kinoshita H, Kubota M, Ohno G Thin Solid Films, 523, 52, 2012 |
2 |
Deposition of amorphous carbon nitride films using Ar/N-2 supermagnetron sputter Kinoshita H, Kubota M, Ohno G Thin Solid Films, 518(13), 3502, 2010 |