검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Fast deposition of microcrystalline Si films from SiH2Cl2 using a high-density microwave plasma source for Si thin-film solar cells Saha JK, Ohse N, Hamada K, Matsui H, Kobayashi T, Jia HJ, Shirai H Solar Energy Materials and Solar Cells, 94(3), 524, 2010 |
| 2 |
High-density microwave plasma-enhanced chemical vapor deposition of microcrystalline silicon from dichlorosilane Ohse N, Hamada K, Saha JK, Kobayashi T, Takemura Y, Shirai H Thin Solid Films, 516(19), 6585, 2008 |
| 3 |
High rate growth highly crystallized microcrystalline silicon films using SiH4/H-2 high-density microwave plasma Saha JK, Jia HJ, Ohse N, Shirai H Thin Solid Films, 515(9), 4098, 2007 |
| 4 |
High-rate synthesis of microcrystalline silicon films using high-density SiH4/H-2 microwave plasma Jia HJ, Saha JK, Ohse N, Shirai H Thin Solid Films, 515(17), 6713, 2007 |