검색결과 : 2건
No. | Article |
---|---|
1 |
Sub-50 nm resolution surface electron emission lithography using nano-Si ballistic electron emitter Kojima A, Ohyi H, Koshida N Journal of Vacuum Science & Technology B, 26(6), 2064, 2008 |
2 |
Potential of a rotary stage electron beam mastering system for fabricating patterned magnetic media Miyazaki T, Hayashi K, Kobayashi K, Kuba Y, Ohyi H, Obara T, Mizuta O, Murayama N, Tanaka N, Kawamura Y, Uemoto H Journal of Vacuum Science & Technology B, 26(6), 2611, 2008 |