화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Sub-50 nm resolution surface electron emission lithography using nano-Si ballistic electron emitter
Kojima A, Ohyi H, Koshida N
Journal of Vacuum Science & Technology B, 26(6), 2064, 2008
2 Potential of a rotary stage electron beam mastering system for fabricating patterned magnetic media
Miyazaki T, Hayashi K, Kobayashi K, Kuba Y, Ohyi H, Obara T, Mizuta O, Murayama N, Tanaka N, Kawamura Y, Uemoto H
Journal of Vacuum Science & Technology B, 26(6), 2611, 2008