검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reduction of thin oxidized copper films using a hot-filament hydrogen radical source Kondoh E, Fukasawa M, Ojimi T Journal of Vacuum Science & Technology A, 25(3), 415, 2007 |
| No. | Article |
|---|---|
| 1 |
Reduction of thin oxidized copper films using a hot-filament hydrogen radical source Kondoh E, Fukasawa M, Ojimi T Journal of Vacuum Science & Technology A, 25(3), 415, 2007 |