검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of commercial ultra-thin Si-on-insulator wafers using laser confocal inspection system Ogura A, Okabayashi O Thin Solid Films, 488(1-2), 189, 2005 |
| No. | Article |
|---|---|
| 1 |
Evaluation of commercial ultra-thin Si-on-insulator wafers using laser confocal inspection system Ogura A, Okabayashi O Thin Solid Films, 488(1-2), 189, 2005 |