검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of polycrystalline SiGe by surface wave excited plasma Takanishi Y, Okayasu I, Toyoda H, Sugai H Thin Solid Films, 516(11), 3554, 2008 |
| No. | Article |
|---|---|
| 1 |
Deposition of polycrystalline SiGe by surface wave excited plasma Takanishi Y, Okayasu I, Toyoda H, Sugai H Thin Solid Films, 516(11), 3554, 2008 |