화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Magnetically enhanced 15 kHz glow discharge of methane
Ledernez L, Olcaytug F, Urban GA, Yasuda HK
Plasma Chemistry and Plasma Processing, 27(6), 659, 2007
2 Photo-induced properties of thin TiO2 films deposited using the radio frequency plasma enhanced chemical vapor deposition method
Szymanowski H, Sobczyk-Guzenda A, Rylski A, Jakubowski W, Gazicki-Lipman M, Herberth U, Olcaytug F
Thin Solid Films, 515(13), 5275, 2007
3 Correlation Between Gas-Phase Composition of RF Plasma of Argon Diluted Tetraethylgermanium and Chemical-Structure of Therewith Deposited Ge/C Films
Gazicki M, Szymanowski H, Tyczkowski J, Schalko J, Olcaytug F
Journal of Vacuum Science & Technology A, 14(5), 2835, 1996
4 Study on Electromagnetron for Plasma Polymerization .2. Magnetic-Field Enhanced Radio-Frequency Plasma Deposition of Organogermanium Films from Tetraethylgermanium
Gazicki M, Schalko J, Olcaytug F, Ebel M, Ebel H, Wernisch J, Yasuda H
Journal of Vacuum Science & Technology A, 12(2), 345, 1994