검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low-temperature preparation of phosphorus doped mu c-Si:H thin films by low-frequency inductively coupled plasma assisted chemical vapor deposition Yan WS, Wei DY, Guo YN, Xu S, Ong TM, Sern CC Thin Solid Films, 520(6), 1724, 2012 |
| 2 |
The fabrication and application of ZnO:Al thin films in low-frequency inductively coupled plasma fabricated silicon solar cell Yan WS, Ong TM, Zhou HP, Xu S Thin Solid Films, 520(23), 6900, 2012 |