검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Super H2O-barrier film using Cat-CVD (HWCVD)-grown SiCN for film-based electronics Nakayama H, Ito M Thin Solid Films, 519(14), 4483, 2011 |
| 2 |
An organic catalytic CVD: Principle, apparatus and applications Hata T, Nakayama H Thin Solid Films, 516(5), 558, 2008 |