검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Applicability Test for Synchrotron-Radiation X-Ray-Lithography in 64-MB Dynamic Random-Access Memory Fabrication Processes Fujii K, Yoshihara T, Tanaka Y, Suzuki K, Nakajima T, Miyatake T, Orita E, Ito K Journal of Vacuum Science & Technology B, 12(6), 3949, 1994 |