검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Design and Performance of an LPCVD Reactor for the Growth of 3C-Silicon Carbide Orthner MP, Rieth LW, Solzbacher F Journal of the Electrochemical Society, 156(9), D364, 2009 |
| No. | Article |
|---|---|
| 1 |
Design and Performance of an LPCVD Reactor for the Growth of 3C-Silicon Carbide Orthner MP, Rieth LW, Solzbacher F Journal of the Electrochemical Society, 156(9), D364, 2009 |