검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Numerical analysis of the pressure dependence of the etch rate in an Al etching reactor equipped with a helicon source Ikeda K, Oshita Y Journal of Vacuum Science & Technology B, 16(1), 159, 1998 |
| No. | Article |
|---|---|
| 1 |
Numerical analysis of the pressure dependence of the etch rate in an Al etching reactor equipped with a helicon source Ikeda K, Oshita Y Journal of Vacuum Science & Technology B, 16(1), 159, 1998 |