화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas
Ostrikov KN, Xu S, Azam ABMS
Journal of Vacuum Science & Technology A, 20(1), 251, 2002
2 Synthesis and structural properties of Al-C-N-O composite thin films
Ning J, Xu S, Ostrikov KN, Chai JW, Li YN, Ling KM, Lee S
Thin Solid Films, 385(1-2), 55, 2001
3 Hysteresis and mode transitions in a low-frequency inductively coupled plasma
Xu S, Ostrikov KN, Luo W, Lee S
Journal of Vacuum Science & Technology A, 18(5), 2185, 2000