검색결과 : 3건
No. | Article |
---|---|
1 |
Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas Ostrikov KN, Xu S, Azam ABMS Journal of Vacuum Science & Technology A, 20(1), 251, 2002 |
2 |
Synthesis and structural properties of Al-C-N-O composite thin films Ning J, Xu S, Ostrikov KN, Chai JW, Li YN, Ling KM, Lee S Thin Solid Films, 385(1-2), 55, 2001 |
3 |
Hysteresis and mode transitions in a low-frequency inductively coupled plasma Xu S, Ostrikov KN, Luo W, Lee S Journal of Vacuum Science & Technology A, 18(5), 2185, 2000 |