화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Magnetization chirality of Ni-Fe and Ni-Fe/Mn-Ir asymmetric ring dots for high-density memory cells
Sasaki I, Nakatani R, Yoshida T, Otaki K, Endo Y, Kawamura Y, Yamamoto M, Takenaga T, Aya S, Kuroiwa T, Beysen S, Kobayashi H
Materials Science Forum, 512, 171, 2006
2 Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror
Otaki K, Yamamoto T, Fukuda Y, Ota K, Nishiyama I, Okazaki S
Journal of Vacuum Science & Technology B, 20(1), 295, 2002
3 Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation
Otaki K, Ota K, Nishiyama I, Yamamoto T, Fukuda Y, Okazaki S
Journal of Vacuum Science & Technology B, 20(6), 2449, 2002