화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Modification of Porous Silicon Formation by Varying the End of Range of Ion Irradiation
Ow YS, Liang HD, Azimi S, Breese MBH
Electrochemical and Solid State Letters, 14(5), D45, 2011
2 Electrochemical Anodization of Silicon-on-Insulator Wafers Using an AC
Breese MBH, Azimi S, Ow YS, Mangaiyarkarasi D, Chan TK, Jiao S, Dang ZY, Blackwood DJ
Electrochemical and Solid State Letters, 13(8), H271, 2010
3 On the Dependence of the Surface Roughness of Electrochemically Anodized Silicon on Ion Irradiation Fluence
Azimi S, Ow YS, Breese MBH
Electrochemical and Solid State Letters, 13(11), H382, 2010
4 Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
Ow YS, Azimi S, Breese MBH, Teo EJ, Mangaiyarkarasi D
Journal of Vacuum Science & Technology B, 28(3), 500, 2010