검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dynamic control of substrate bias for highly c-axis textured thin ferromagnetic CoCrTa film in inductively coupled plasma-assisted sputtering Okimura K, Oyanagi J Journal of Vacuum Science & Technology A, 23(1), 39, 2005 |
| 2 |
Performance of inductively coupled plasma assisted sputtering with internal coil for ferromagnetic CoCrTa film deposition Okimura K, Oyanagi J Journal of Vacuum Science & Technology A, 22(1), 39, 2004 |