검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition Ozgit C, Donmez I, Alevli M, Biyikli N Thin Solid Films, 520(7), 2750, 2012 |
| 2 |
The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition Alevli M, Ozgit C, Donmez I, Biyikli N Journal of Crystal Growth, 335(1), 51, 2011 |
| 3 |
Isochronal hydrogenation of textured Mg/Pd thin films Ozgit C, Akyildiz H, Ozturk T Thin Solid Films, 518(17), 4762, 2010 |