검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Extendibility of Synchrotron-Radiation Lithography to the Sub-100 nm Region Deguchi K, Miyoshi K, Oda M, Matsuda T, Ozawa A, Yoshihara H Journal of Vacuum Science & Technology B, 14(6), 4294, 1996 |
| No. | Article |
|---|---|
| 1 |
Extendibility of Synchrotron-Radiation Lithography to the Sub-100 nm Region Deguchi K, Miyoshi K, Oda M, Matsuda T, Ozawa A, Yoshihara H Journal of Vacuum Science & Technology B, 14(6), 4294, 1996 |