검색결과 : 2건
No. | Article |
---|---|
1 |
Chiral Nematic Fluids as Masks for Lithography Jeong HS, Kim YH, Lee JS, Kim JH, Srinivasarao M, Jung HT Advanced Materials, 24(3), 381, 2012 |
2 |
Molybdenum Silicide Based Attenuated Phase-Shift Masks Jonckheere R, Ronse K, Popa O, Vandenhove L Journal of Vacuum Science & Technology B, 12(6), 3765, 1994 |