검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma etching of SiO2 contact hole using perfluoropropyl vinyl ether and perfluoroisopropyl vinyl ether You SH, Kim JH, Kim CK Korean Journal of Chemical Engineering, 39(1), 63, 2022 |
| No. | Article |
|---|---|
| 1 |
Plasma etching of SiO2 contact hole using perfluoropropyl vinyl ether and perfluoroisopropyl vinyl ether You SH, Kim JH, Kim CK Korean Journal of Chemical Engineering, 39(1), 63, 2022 |