검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Sheath Impedance Effects in Very High-Frequency Plasma-Experiments Schwarzenbach W, Howling AA, Fivaz M, Brunner S, Hollenstein C Journal of Vacuum Science & Technology A, 14(1), 132, 1996 |
| 2 |
Dependence of the Self-Bias on the Plasma Parameters and on the Electrode Areas in RF Plasma Reactors Deutsch R, Schwarz J Plasma Chemistry and Plasma Processing, 16(4), 499, 1996 |
| 3 |
Prediction of Ion Energy and Angular-Distributions in Single and Dual-Frequency Plasmas Myers FR, Ramaswami M, Cale TS Journal of the Electrochemical Society, 141(5), 1313, 1994 |