검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Solid-phase crystallization of hydrogenated amorphous silicon/hydrogenated microcrystalline silicon bilayers deposited by plasma-enhanced chemical vapor deposition Park CD, Kim HY, Cho MH, Jan KJ, Lee JY Thin Solid Films, 359(2), 268, 2000 |
| 2 |
Kinetic modeling and dopant effect on silicon deposition - Low pressure and plasma assisted chemical vapor deposition Masi M, Zonca R, Carra S Journal of the Electrochemical Society, 146(1), 103, 1999 |
| 3 |
Applicability of Raman scattering for the characterization of nanocrystalline silicon Ossadnik C, Veprek S, Gregora I Thin Solid Films, 337(1-2), 148, 1999 |