검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Expanding microwave plasma for steel carburizing: Role of the plasma impinging species on the steel surface reactivity Jauberteau I, Cinelli MJ, Cahoreau M, Jauberteau JL, Aubreton J Journal of Vacuum Science & Technology A, 18(1), 108, 2000 |
| 2 |
Low temperature ZrB2 remote plasma enhanced chemical vapor deposition Pierson JF, Belmonte T, Czerwiec T, Hertz D, Michel H Thin Solid Films, 359(1), 68, 2000 |
| 3 |
Low-Temperature Zirconia Thin-Film Synthesis by a Chemical-Vapor-Deposition Process Involving Zrcl4 and O-2-H-2-Ar Microwave Postdischarges - Comparison with a Conventional CVD Hydrolysis Process Gavillet J, Belmonte T, Hertz D, Michel H Thin Solid Films, 301(1-2), 35, 1997 |
| 4 |
Elaboration and Study of an Elastic Hard Si-Based Coating Obtained at Room-Temperature from a Far Cold Remote Nitrogen Plasma Baclez E, Mutel B, Dessaux O, Goudmand P, Grimblot J, Gengembre L Thin Solid Films, 303(1-2), 156, 1997 |