검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
On the Spatial-Resolution of 2-Dimensional Doping Profiles as Measured Using Secondary-Ion Mass-Spectrometry Tomography Liu X, Goodwinjohansson S, Jacobson JD, Ray MA, Mcguire GE Journal of Vacuum Science & Technology B, 12(1), 116, 1994 |