검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
0.1 Mu-M AlGaAs/InGaAs High-Electron-Mobility Transistor Fabrication by the New Method of Thinned Resist Pattern Reversed by Metal Tanabe M, Matsuno T, Kashiwagi N, Sakai H, Inoue K, Tamura A Journal of Vacuum Science & Technology B, 14(5), 3248, 1996 |