검색결과 : 1건
No. | Article |
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1 |
Liquid immersion lens technology applied to laser voltage probing of 130 nm process technology devices Nataraj N, Deslandes H, Lo W, Eiles T, Pardy P Journal of Vacuum Science & Technology B, 20(6), 3067, 2002 |
No. | Article |
---|---|
1 |
Liquid immersion lens technology applied to laser voltage probing of 130 nm process technology devices Nataraj N, Deslandes H, Lo W, Eiles T, Pardy P Journal of Vacuum Science & Technology B, 20(6), 3067, 2002 |