화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Demonstration of a wireless driven MEMS pond skater that uses EWOD technology
Mita Y, Li Y, Kubota M, Morishita S, Parkes W, Haworth LI, Flynn BW, Terry JG, Tang TB, Ruthven AD, Smith S, Walton AJ
Solid-State Electronics, 53(7), 798, 2009
2 Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication
Li Y, Parkes W, Haworth LI, Stokes AA, Muir KR, Li P, Collin AJ, Hutcheon NG, Henderson R, Rae B, Walton AJ
Solid-State Electronics, 52(9), 1382, 2008
3 Reflectance Modeling for in-Situ Dry Etch Monitoring of Bulk SiO2 and III-V Multilayer Structures
Hicks SE, Parkes W, Wilkinson JA, Wilkinson CD
Journal of Vacuum Science & Technology B, 12(6), 3306, 1994
4 Very-Low Damage Etching of GaAs
Murad SK, Wilkinson CD, Wang PD, Parkes W, Sotomayortorres CM, Cameron N
Journal of Vacuum Science & Technology B, 11(6), 2237, 1993