검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inhomogeneous nucleation and growth of palladium and alloyed cobalt during self-aligned capping of advanced copper interconnects Olivier S, Decorps T, Calvo-Munoz M, Da Silva S, Cayron C, Haumesser PH, Passemad G Thin Solid Films, 518(17), 4773, 2010 |