검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of the NiFe sputter etch process in a rf plasma Kropewnicki TJ, Paterson AM, Panagopoulos T, Holland JP Journal of Vacuum Science & Technology A, 24(3), 444, 2006 |
| No. | Article |
|---|---|
| 1 |
Characterization of the NiFe sputter etch process in a rf plasma Kropewnicki TJ, Paterson AM, Panagopoulos T, Holland JP Journal of Vacuum Science & Technology A, 24(3), 444, 2006 |