검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Generalized scanning beam interference lithography system for patterning gratings with variable period progressions Pati GS, Heilmann RK, Konkola PT, Joo C, Chen CG, Murphy E, Schattenburg ML Journal of Vacuum Science & Technology B, 20(6), 2617, 2002 |
| 2 |
Beam alignment for scanning beam interference lithography Chen CG, Heilmann RK, Joo C, Konkola PT, Pati GS Journal of Vacuum Science & Technology B, 20(6), 3071, 2002 |
| 3 |
Precision fringe metrology using a Fresnel zone plate Joo C, Pati GS, Chen CG, Konkola PT, Heilmann RK, Schattenburg ML, Liddle A, Anderson EH Journal of Vacuum Science & Technology B, 20(6), 3075, 2002 |
| 4 |
Image metrology and system controls for scanning beam interference lithography Chen CG, Konkola PT, Heilmann RK, Pati GS, Schattenburg ML Journal of Vacuum Science & Technology B, 19(6), 2335, 2001 |
| 5 |
Digital heterodyne interference fringe control system Heilmann RK, Konkola PT, Chen CG, Pati GS, Schattenburg ML Journal of Vacuum Science & Technology B, 19(6), 2342, 2001 |